发明名称 ABRASIVE AND POLISHING COMPOSITION
摘要 <p>A polishing composition which comprises an abrasive and water is provided. The abrasive comprises zirconium oxide particles. In one embodiment, the crystallite size of the zirconium oxide particles as calculated on the basis of the diffracted X-ray intensity measured in the vicinity of 2? of 28.0° in the powder X-ray diffractometry and that as calculated on the basis of the diffracted X-ray intensity measured in the vicinity of 2? of 31.0° therein are 330 Å or more, while the mean primary particle diameter of the zirconium oxide particles is 0.2µm or more. In another embodiment, the mean secondary particle diameter of the zirconium oxide particles is 1.0µm or less, while the value obtained by dividing the mean secondary particle diameter of the zirconium oxide particles by the mean primary particle diameter thereof is 1.5 or less. The polishing composition is usable in polishing a hard and brittle material such as sapphire.</p>
申请公布号 WO2012169515(A1) 申请公布日期 2012.12.13
申请号 WO2012JP64531 申请日期 2012.06.06
申请人 FUJIMI INCORPORATED;MIWA, NAOYA;MORINAGA, HITOSHI;OYA, YOZO;IWAKUNI, MAYUMI;SUGIYAMA, HIROYASU;MORI, MICHIO 发明人 MIWA, NAOYA;MORINAGA, HITOSHI;OYA, YOZO;IWAKUNI, MAYUMI;SUGIYAMA, HIROYASU;MORI, MICHIO
分类号 B24B37/00;C09K3/14;H01L21/304 主分类号 B24B37/00
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