发明名称 |
METHOD FOR MANUFACTURING PHOTOELECTRIC CONVERSION DEVICE AND LIGHT BEAM IRRADIATION PROCESSING DEVICE |
摘要 |
There is provided a method for producing a photoelectric conversion device in which an object to be processed (12) is processed by directing a light beam (22) to a position determined based on information including temperature information and distortion information acquired in advance. There is also provided a light beam irradiation processing apparatus including a control portion (17) capable of controlling a light beam generating portion (11) and a drive portion (16a, 16b) in such a manner that a light beam (22) can be directed to a position determined based on information including temperature information acquired by a temperature information acquiring portion (18, 52, 53) and distortion information stored therein. |
申请公布号 |
EP2532467(A1) |
申请公布日期 |
2012.12.12 |
申请号 |
EP20110739784 |
申请日期 |
2011.02.02 |
申请人 |
SHARP KABUSHIKI KAISHA |
发明人 |
TACHIBANA, SHINSUKE;SHIMADA, KOJI;SHICHIJO, YOICHI |
分类号 |
B23K26/00;B23K26/42;B23K101/42;H01L31/04 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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