发明名称 METHOD FOR MANUFACTURING PHOTOELECTRIC CONVERSION DEVICE AND LIGHT BEAM IRRADIATION PROCESSING DEVICE
摘要 There is provided a method for producing a photoelectric conversion device in which an object to be processed (12) is processed by directing a light beam (22) to a position determined based on information including temperature information and distortion information acquired in advance. There is also provided a light beam irradiation processing apparatus including a control portion (17) capable of controlling a light beam generating portion (11) and a drive portion (16a, 16b) in such a manner that a light beam (22) can be directed to a position determined based on information including temperature information acquired by a temperature information acquiring portion (18, 52, 53) and distortion information stored therein.
申请公布号 EP2532467(A1) 申请公布日期 2012.12.12
申请号 EP20110739784 申请日期 2011.02.02
申请人 SHARP KABUSHIKI KAISHA 发明人 TACHIBANA, SHINSUKE;SHIMADA, KOJI;SHICHIJO, YOICHI
分类号 B23K26/00;B23K26/42;B23K101/42;H01L31/04 主分类号 B23K26/00
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