THIN FILM TRANSISTOR, MANUFACTURING METHOD OF THIN FILM TRANSISTOR, AND ORGANIC LIGHT EMITTING DIODE DISPLAY INCLUDING THE SAME

摘要

PURPOSE: A thin film transistor, a manufacturing method thereof, and an organic light emitting device including the same are provided to reduce leakage current by simultaneously etching source and drain electrodes to remove residual metal catalyst. CONSTITUTION: A buffer layer is formed on a substrate. A semiconductor layer is formed on the buffer layer. A gate insulating pattern(141) is formed on the semiconductor layer. A gate electrode is formed n the gate insulating pattern. An inter-layer insulating film includes contactors(161,162), and opening parts(163,164).