发明名称 Method for manufacturing a piezoelectric film, a liquid ejection head, and a liquid ejection device
摘要 <p>A method for manufacturing a piezoelectric film includes: forming a piezoelectric precursor film using a precursor solution including a metal compound having Bi, Fe, Mn, Ba, and Ti; and obtaining a piezoelectric film preferentially oriented with the (110) plane by heating and crystallizing the piezoelectric precursor film.</p>
申请公布号 EP2363903(A3) 申请公布日期 2012.12.12
申请号 EP20110156110 申请日期 2011.02.25
申请人 SEIKO EPSON CORPORATION 发明人 YASUAKI, HAMADA
分类号 H01L41/18;B41J2/045;B41J2/055;B41J2/135;B41J2/14;B41J2/16;C04B35/26;H01L41/09;H01L41/187;H01L41/317;H01L41/318;H01L41/39 主分类号 H01L41/18
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