发明名称 METHOD AND APPARATUS FOR FORMING A SHEET FROM THE MELT
摘要 <p>A method and apparatus for forming a sheet are disclosed. A melt is cooled and a sheet is formed on the melt. This sheet has a first thickness. The sheet is then thinned from the first thickness to a second thickness using, for example, a heater or the melt. The cooling may be configured to allow solutes to be trapped in a region of the sheet and this particular sheet may be thinned and the solutes removed. The melt may be, for example, silicon, silicon and germanium, gallium, or gallium nitride.</p>
申请公布号 EP2319089(B1) 申请公布日期 2012.12.12
申请号 EP20090807242 申请日期 2009.08.12
申请人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES 发明人 KELLERMAN, PETER, L.;CARLSON, FREDERICK;SINCLAIR, FRANK
分类号 C30B29/06;C30B11/00;C30B28/06;C30B29/40;C30B29/52;C30B29/60;H01L31/18 主分类号 C30B29/06
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