发明名称 |
METHOD AND APPARATUS FOR FORMING A SHEET FROM THE MELT |
摘要 |
<p>A method and apparatus for forming a sheet are disclosed. A melt is cooled and a sheet is formed on the melt. This sheet has a first thickness. The sheet is then thinned from the first thickness to a second thickness using, for example, a heater or the melt. The cooling may be configured to allow solutes to be trapped in a region of the sheet and this particular sheet may be thinned and the solutes removed. The melt may be, for example, silicon, silicon and germanium, gallium, or gallium nitride.</p> |
申请公布号 |
EP2319089(B1) |
申请公布日期 |
2012.12.12 |
申请号 |
EP20090807242 |
申请日期 |
2009.08.12 |
申请人 |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES |
发明人 |
KELLERMAN, PETER, L.;CARLSON, FREDERICK;SINCLAIR, FRANK |
分类号 |
C30B29/06;C30B11/00;C30B28/06;C30B29/40;C30B29/52;C30B29/60;H01L31/18 |
主分类号 |
C30B29/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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