| 摘要 |
<p>An imaging optical system (7) comprises a plurality of mirrors (M1 to M8), which image an object field (4) in an object plane (5) into an image field (8) in an image plane (9). At least three of the mirrors (M6, M7, M8) are obscured, and thus have a through-opening (21) for imaging light (15) to pass through. At least one intermediate image plane (23) is present between the object plane (5) and the image plane (9). The intermediate image plane (23) which is closest to the image plane (9) in the light path between the object field (4) and the image field (8), is spatially arranged between the last mirror (M8) in the light path and the image plane (9). These measures lead to an imaging optical system with improved imaging properties and/or reduced production costs.</p> |
