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发明名称
摘要
申请公布号	JP5093224(B2)	申请公布日期	2012.12.12
申请号	JP20090503848	申请日期	2007.03.15
申请人		发明人
分类号	H01L21/822;H01L27/04;H03H11/04	主分类号	H01L21/822
代理机构		代理人
主权项
地址

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