Thermoelectric nanowire and method of manufacturing the same

摘要

A thermoelectric nanowire and a method of manufacturing the same, in which an oxide layer and a thermoelectric material layer, both of which have different thermal expansion coefficients, are stacked on a substrate, and a single crystal thermoelectric nanowire is grown from a thermoelectric material using the compressive stress caused by the difference between the thermal expansion coefficients. The method includes preparing a substrate (10) on which an oxide layer (31) is formed, forming a plurality of nanoparticles (50), each of which includes aluminum (Al), silver (Ag), iron (Fe) or oxides thereof, on the oxide layer (30), forming a thermoelectric material thin film (70), which has thermoelectric properties, above the oxide layer (30) so as to include the nanoparticles (50) formed on the oxide layer (30), heat-treating the substrate (10) having the thermoelectric material thin film (70) to grow the thermoelectric nanowire (90) containing the nanoparticles (50), and cooling the substrate (10) at room temperature after the heat-treatment.