HEATING DEVICE WITH LEVITATION AND TRANSPORTATION

摘要

PURPOSE: A floating and transferring type heating apparatus is provided to heat and transfer a substrate with a coating film without generating stains on the coating film. CONSTITUTION: A floating and transferring type heating apparatus(1) includes a vibration plate(2), a heater(3), an ultrasound wave generator(4), and a transferring part(5). The vibration plate vibrates and floats a substrate(W) with ultrasound waves. The heater heats the vibration plate. The ultrasound wave generator applies ultrasound wave-based vibrations to the vibration plate. The transferring part transfers the substrate to the vertical direction of the floated direction of the substrate. The heater is arranged to be spaced apart from the vibration plate. The entire surface of the substrate under transferring is heated by the vibration plate.