Method for spin-coating and method for manufacturing substrate having structure

摘要

Disclosed herein are an apparatus and a method for spin coating, and a method for manufacturing a substrate having a structure. The spin-coating apparatus includes a support to support a substrate having a structure, a motor to rotate the support to perform spin-coating with respect to the structure, and a heat source to heat a coating material which is subjected to the spin-coating to perform pre-baking. The method for spin-coating a substrate having a structure includes preparing the substrate having the structure of a predetermined height formed on an upper portion thereof, coating the structure of the substrate with photoresist, and performing spin-coating of the photoresist in a place in which a heat source is provided, while performing pre-baking of the photoresist.