Method of producing a polymer stamp for the reproduction of devices comprising microstructures and nanostructures and corresponding device

摘要

A method of producing a polymer stamp for the reproduction of devices is provided, wherein the device comprises microstructures and nanostructures. The method comprises the steps of providing a thermoplastic foil (27), providing a first substrate (1), patterning nanostructures (3) into the thermoplastic foil (27), patterning microstructures (5, 6) onto the first substrate (1), covering the first substrate (1) surface comprising the microstructures (5, 6) with the nanostructured thermoplastic foil (27), casting a polymer elastomer onto the first substrate (1) with nanostructures (3) and microstructures (5, 6) to form a polymer stamp (11) and releasing the polymer stamp (11). Accordingly, a polymer stamp and a device are provided, wherein the aspect ratio of a single nanostructure element in the polymer stamp or the device is larger than 5.