| 摘要 |
A mass spectrometer is disclosed which is particularly useful in analysing ion beams over a wide range of ion masses. Individual beams of different mass ions are imaged on to an array of slits in a slit array plate 7, the spacing of the slits corresponding to the spacing of the set of ion beams 1 to 6 resulting from magnetically spreading a mixed ion beam. Individual detectors 8, 9, 10, 17, 18 and 19, e.g. Faraday buckets, are associated with each slit. In accordance with the invention, a number of electrostatic analysers 14, 15, 16 are positioned between some or all of the slits in the slit array plate 7 and the associated detector elements. The electrostatic analysers capture stray ions and electrons and accordingly markedly increase the sensitivity of the apparatus.
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