| 摘要 |
PURPOSE: Inspection equipment and an inspection method using the same are provided to install a sample in the inside of the inspection equipment, thereby reducing inspection time and enhancing the inspection reliability of an inspection object. CONSTITUTION: Inspection equipment comprises a photographing module(110) and a light irradiating module(120). The photographing module photographs an inspection object and a sample. The light irradiating module is arranged by being separated from one side of the photographing module, thereby irradiating lights to the photographing module. The light irradiating module comprises a light irradiating body, a light irradiating unit, a window unit, the sample, and a sample moving unit. The light irradiating body comprises an internal space. The light irradiating unit is arranged in the inside of the light irradiating body, thereby emitting lights. The window unit is positioned on the light irradiating unit correspondently to one side of one side of the light irradiating unit and faces to the photographing module. The sample is arranged in between the light irradiating unit and window unit in the inside of the light irradiating body. The sample moving unit moves the sample in the inside of the light irradiating body.
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