| 摘要 |
PURPOSE: A polymer compound is provided to form a pattern with excellent resolution and excellent rectangular ability and to obtain a resist material with good adhesion as a substrate. CONSTITUTION: A polymer compound contains a repeating unit in chemical formula 1. In chemical formula 1, R^1 is a hydrogen, fluorine, methyl, or trifluoromethyl, R^2, R^3 and R^4 is selected from a substituted or unsubstituted C1-10 linear, branched or cyclic alkyl, alkenyl and oxoalkyl or can form a ring with a sulfur atom combined with two or more of R^2, R^3 and R^4, X^1 is O or CH2, A^1 is a C1-10 linear, branched or cyclic divalent hydrocarbon group, B^1 is C1-10 alkylene or C6-18 arylene which can comprise hetero atoms except fluorine, and k^1 is 0 or 1.
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