| 摘要 |
PURPOSE: An alignment apparatus for a probe card is provided to rapidly and reliably align the probe card by automatically aligning the probe card according to position of a film type chip to be inspected. CONSTITUTION: A detection module(100) detects the position of a film type chip to be inspected. A control module(200) transmits an alignment signal for aligning a probe card according to the position of the film type chip which is detected in the detection module. A first moving module moves the probe card to an X-axis according to the alignment signal which is transmitted from the control module. A second moving module(400) moves the probe card to a Y-axis according to the alignment signal which is transmitted from the control module. A third moving module(500) rotates the probe card according to the alignment signal which is transmitted from the control module. [Reference numerals] (100) Detection module; (200) Control module; (300) First moving module; (400) Second moving module; (500) Third moving module
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