发明名称 |
Method of fabricating a charge trap NAND flash memory device |
摘要 |
Subject matter disclosed herein relates to a method of manufacturing a semiconductor integrated circuit device, and more particularly to a method of fabricating a charge trap NAND flash memory device. |
申请公布号 |
US8329545(B1) |
申请公布日期 |
2012.12.11 |
申请号 |
US20080346363 |
申请日期 |
2008.12.30 |
申请人 |
MEOTTO UMBERTO M.;ALBINI GIULIO;TESSARIOL PAOLO;BACCIAGLIA PAOLA;MARIANI MARCELLO;MICRON TECHNOLOGY, INC. |
发明人 |
MEOTTO UMBERTO M.;ALBINI GIULIO;TESSARIOL PAOLO;BACCIAGLIA PAOLA;MARIANI MARCELLO |
分类号 |
H01L21/336 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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