Information managing method, information managing apparatus and substrate processing system

摘要

An information managing method for managing information, based upon an electronic message containing apparatus information or event information transmitted from a substrate processing apparatus, comprises: storing the apparatus information of the substrate processing apparatus at the transmission time of the electronic message containing the apparatus information in a first apparatus information storage unit; when the electronic message containing the event information is transmitted, comparing conditions for accumulating the event information and the apparatus information; and when the conditions coincide with each other, storing the apparatus information in a second apparatus information storage unit in association with time when the event information has been generated.