发明名称 |
Thin film transistor array panel and method for manufacturing the same |
摘要 |
The present disclosure relates to a thin film transistor array panel and a manufacturing method thereof. The method comprises: forming a thin film transistor on a substrate; forming a color filter adjacent to the thin film transistor and over the same substrate; depositing a first passivation layer on the color filter; coating a photosensitive film on the first passivation layer and exposing the photosensitive film to light using a first photomask to form a first photosensitive film pattern that comprises a first portion and a second portion that is thicker than the first portion, the first photosensitive film pattern exposing the first passivation layer around a circumference of the second portion; removing the exposed first passivation layer using the first photosensitive film pattern as an etch mask; blanket etching a whole surface of the first photosensitive film pattern until the first portion is removed to form a second photosensitive film pattern; depositing a conductive layer on the second photosensitive film pattern; and removing the second photosensitive film pattern to thereby selectively lift off portions of the conductive layer where a left behind portion forms a pixel electrode. |
申请公布号 |
US8329486(B2) |
申请公布日期 |
2012.12.11 |
申请号 |
US20090472979 |
申请日期 |
2009.05.27 |
申请人 |
LEE YUN-SEOK;CHO YOUNG-JE;KIM SUNG-HOON;SAMSUNG DISPLAY CO., LTD. |
发明人 |
LEE YUN-SEOK;CHO YOUNG-JE;KIM SUNG-HOON |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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