发明名称 |
Apparatus for transferring a substrate |
摘要 |
In one embodiment, a transfer robot for transferring a substrate includes a supporting means, a transfer robot arm including a first sub-robot arm and a second sub-robot arm arranged over the supporting means, an inner rail and an outer rail adjacent to the inner rail overlying the supporting means. The first sub-robot arm is adapted to move in a straight line motion along the inner rail and the second sub-robot arm is adapted to move in a straight line motion along the outer rail. The second sub-robot arm surrounds the first sub-robot arm.
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申请公布号 |
US8328940(B2) |
申请公布日期 |
2012.12.11 |
申请号 |
US201113041338 |
申请日期 |
2011.03.04 |
申请人 |
CHOI JAE-WOOK;KIM YOUNG-ROK;JUSUNG ENGINEERING CO., LTD. |
发明人 |
CHOI JAE-WOOK;KIM YOUNG-ROK |
分类号 |
C23C16/00;H01L21/00;H01L21/306 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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