| 摘要 |
PURPOSE: A method and apparatus for forming a paste film are provided to improve quality by moving a scraper back not to collide with the upper side of a table. CONSTITUTION: A paste film is formed by relatively moving a squeegee(2) on a table(1). Paste is supplied to the table. The paste film is removed by moving a scraper(3) to the table. The scraper moves back not to contact with the upper side of the table in a thin film process. A gap is formed between the lower side of squeeze and the upper side of the table. [Reference numerals] (AA) Step 1; (BB) Step 2; (CC) Step 3; (DD) Step 4; (EE) Step 5; (FF) Step 6; (GG) Step 7; (HH) Step 8; (II) Step 9; (JJ) Step 10; (KK) Step 11 |
