| 摘要 |
<p>PURPOSE: An apparatus and method for processing a substrate are provided to improve a processing ratio of the substrate since the substrate directly enters a second processing from a chamber to a transfer module without passing through a load lock chamber. CONSTITUTION: A robot transferring a substrate between a container and a process module is provided to a transfer module. The process module comprises a transfer chamber, a load lock chamber(1310), a first process chamber(1330), and a second process chamber(1340). The robot transferring the substrate is provided to the transfer chamber. The load lock chamber is arranged between the transfer chamber and the transfer module. The first process chamber performs first processing while being arranged to be separated from the transfer module at the circumference of the transfer chamber. The second process chamber performs second processing while being arranged at the circumference of the transfer chamber.</p> |
