LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD.,申请号NL20112006923-传众专利搜索

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发明名称	LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD.
摘要
申请公布号	NL2006923(A)	申请公布日期	2012.12.11
申请号	NL20112006923	申请日期	2011.06.09
申请人	ASML NETHERLANDS B.V.	发明人	PADIY ALEXANDER VIKTOROVYCH;MENCHTCHIKOV BORIS;MIDDLEBROOKS SCOTT
分类号	G03F7/20	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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