Method and system for providing resonant frequency change compensation in a drive signal for a MEMS scanner

摘要

A method for providing feed forward compensation in a drive signal for a rapid resonant frequency change due to a rapid LASER intensity change upon a micro-electro-mechanical system (MEMS) mirror and/or a surrounding MEMS structure in a MEMS scanner causing a mirror temperature change is provided. The method includes determining an intensity factor for at least one laser beam projected onto the MEMS scanner and adjusting a drive frequency of the drive signal based on the intensity factor. The intensity could represent a single intensity factor for multiple laser beams projected onto the MEMS scanner. The method could also include delaying the adjustment of the drive frequency to allow the resonant frequency change to take affect in the MEMS scanner. Delaying the adjustment could include delaying delivery of the intensity factor such that the intensity factor is provided coincident with the resonant frequency change of the MEMS scanner.