| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a bonded plate-like body inspection device capable of obtaining an inspection image that can show bubbles and foreign matters in adhesive and the state of adhesive in the surrounding area even if there is a light non-transmitting area around the bonded plate-like body. <P>SOLUTION: A bonded plate-like body inspection device comprises a line sensor camera 50, first illumination means 51 that illuminates the surface of a bonded plate-like body 10 from a first plate-like body 11 side of the bonded plate-like body 10, and second illumination means 52 that illuminates from a second plate-like body 12 side of the bonded plate-like body 10 toward the line sensor camera 50. The first illumination means 51 obliquely illuminates, from above the bonded plate-like body 10, a predetermined area E<SB POS="POST">L</SB>extending in a direction along a photographing line L<SB POS="POST">C</SB>from a point at a predetermined distance from the photographing line L<SB POS="POST">C</SB>on the surface of the bonded plate-like body 10. In the state illuminated by the first illumination means 51 and the second illumination means 52, an inspection image is produced as the line sensor camera 50 scans the bonded plate-like body 10. <P>COPYRIGHT: (C)2013,JPO&INPIT |
