| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a scanning optical system capable of compensating fluctuation in beam spot diameter and fluctuation in beam spot position on a scanning object surface by a compact and simple configuration. <P>SOLUTION: The scanning optical system includes compensation means for compensating for the fluctuation in the beam spot diameter and the fluctuation in the beam spot position on the scanning object surface, in an optical path for deflecting a light flux radiated from light source means by deflection means and imaging onto the scanning surface. The compensation means includes: a plurality of optical elements constituting an optical system, disposed along an optical axis of the optical system, and including an optical surface having a shape plane-symmetric to a symmetry plane that includes the optical axis and a symmetry axis perpendicular to the optical axis; first drive means for changing the relative positions of the plurality of optical elements in the direction parallel to the symmetry axis; and second drive means for changing the positional relationship of the plurality of optical elements in the direction parallel to the symmetry axis without affecting the change in the relative positions of the plurality of optical elements. <P>COPYRIGHT: (C)2013,JPO&INPIT |
