| 摘要 |
<P>PROBLEM TO BE SOLVED: To identify the shape of the bottom surface of a recess accurately. <P>SOLUTION: Recesses 180a, 180b, i.e. markers for alignment when bonding an actuator unit onto a plate 122, are formed in the plates 122, 123. The recess 180a, 180b is configured of a columnar hole 181 having a circular opening edge 185a, and an annular hole 182 connected with the columnar hole 181 via an annular opening 183. The bottom surface 186 of the recess 180a, 180b is arranged on the inside of the opening edge 185a when viewed from the lamination direction of the plates 122, 123. <P>COPYRIGHT: (C)2013,JPO&INPIT |
