| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing mask blanks suppressing the deterioration of flatness, and a method for manufacturing transfer masks. <P>SOLUTION: The method for manufacturing mask blanks includes steps of: preparing a glass substrate of which main surface is mirror polished; performing a heat treatment for the prepared glass substrate; and forming a thin film that is formed of a material including tantalum and substantially including no hydrogen, on the main surface of the glass substrate after the heat treatment. <P>COPYRIGHT: (C)2013,JPO&INPIT |
