| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the time needed to search for marks formed on a substrate or an object to be processed. <P>SOLUTION: A substrate 30, or an object to be processed, is photographed in a visual field range S2 smaller than the substrate 30 sequentially from one field to another by moving the relative positions of the substrate 30 and a photographing unit to detect a mark 31 formed on the substrate 30. Here, if part of the mark 31 is included in the shot image, the relative positions of the substrate 30 and the photographing unit are moved until the whole of the mark 31 is positioned within the visual field range SF. Then, the mark 31 is shot by the photographing unit again and compared with a previously acquired comparison image of the mark 31, in which way the position of the mark 31 is detected. <P>COPYRIGHT: (C)2013,JPO&INPIT |
