发明名称 NANO TOOL EXCHANGER SYSTEM
摘要 <P>PROBLEM TO BE SOLVED: To provide a nano exchanger system for automating nano tool exchange in a short period of time and with high accuracy without causing an environmental change in a sample, for example, in a sample chamber without releasing chamber air of a vacuum sample chamber. <P>SOLUTION: The nano exchanger system is a method and device including any or all of the following: nano tool adapters 3 capable of being fixed and released to/from different nano tools 2; a nano tool holder 1 capable of housing a single or a plurality of nano tool adapters 3; and a nano tool attaching mechanism 4 for positioning the nano tools 2 for use. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012242372(A) 申请公布日期 2012.12.10
申请号 JP20110122711 申请日期 2011.05.16
申请人 FUKUDA TOSHIO;NAKAJIMA MASAHIRO;KOJIMA MASARU 发明人 FUKUDA TOSHIO;NAKAJIMA MASAHIRO;KOJIMA MASARU
分类号 G01N1/28;H01J37/20 主分类号 G01N1/28
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