| 摘要 |
FIELD: physics.SUBSTANCE: integrated pressure transducer with three solid centres is in form of a monocrystalline silicon plate, on whose first side tensoresistors are formed and electrically connected into a Wheatstone bridge, and on the second side of the monocrystalline silicon plate there is a depression which does not reach the edge of the plate, consisting of four parallel grooves and two of its sections which connect ends of the parallel grooves with each other and having with them a common flat bottom which, together with the first side of the plate, forms a thin part of a membrane surrounding three solid centres obtained thus. On each straight section of the membrane opposite the bottom of the corresponding groove, there is a tensoresistors of one of the arms of the Wheatstone bridge, wherein not less than 10% of the area of the bottom of the thin part of the membrane lies outside the strip bounded by two parallel straight lines which are superposed with outer boundaries of grooves belonging to the outline of the bottom of the membrane.EFFECT: invention increases efficiency of converting pressure to an electrical signal with small values of mechanical action, broadens functional capabilities and reduces the cost of producing the transducer.5 cl, 2 dwg |
