| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor improved in characteristics so that sensitivity is prevented from decreasing due to reduction in a polarization amount of a piezoelectric layer, even when ambient temperature of the angular velocity sensor rises for an extended period. <P>SOLUTION: An angular velocity sensor includes an inorganic compound in an adhesive agent 89, and provides a moisture getter material 90 in a case 70. Accordingly, accuracy is improved of an output signal of the angular velocity sensor. <P>COPYRIGHT: (C)2013,JPO&INPIT |
