MANUFACTURING METHOD OF PATTERN-SHAPED METAL FILM

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a pattern-shaped metal film capable of stably manufacturing a metal film of a desired pattern in a manufacturing method of a pattern-shaped metal film in which a thickness of a resist film is made relatively small and the metal film is overetched.

SOLUTION: A manufacturing method of a pattern-shaped metal film includes, in order, a step (A) of forming a pattern-shaped resist film on a metal film and a step (B) of etching the metal film. The resist film has a thickness of 5 μm or lower and a pencil hardness of B or less. The step (B) overetches the pattern-shaped metal film so that a line width of the pattern-shaped metal film is 80% or lower based on a line width 100% of the resist film.

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