发明名称 SEMICONDUCTOR GAS ANALYSER
摘要 FIELD: physics.SUBSTANCE: semiconductor base is made from a polycrystalline film cadmium selenide doped with indium antimonide. The substrate is the electrode pad of a piezo-quartz resonator.EFFECT: high sensitivity of the sensor and manufacturability thereof.3 dwg
申请公布号 RU2469300(C1) 申请公布日期 2012.12.10
申请号 RU20110120656 申请日期 2011.05.20
申请人 GOSUDARSTVENNOE OBRAZOVATEL'NOE UCHREZHDENIE VYSSHEGO PROFESSIONAL'NOGO OBRAZOVANIJA "OMSKIJ GOSUDARSTVENNYJ TEKHNICHESKIJ UNIVERSITET" 发明人 KIROVSKAJA IRAIDA ALEKSEEVNA;DUBINA OKSANA NIKOLAEVNA
分类号 G01N27/12 主分类号 G01N27/12
代理机构 代理人
主权项
地址