DEVICE FOR MEASURING ENVIRONMENTAL FORCES AND METHOD OF FABRICATING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing highly sensitive pressure sensors that are not only small in size but can be effectively produced in high volume.

SOLUTION: A device for measuring environmental forces is disclosed that comprises a device wafer comprising a first device layer 100 separated from a second device layer 200 by a first insulation layer 150. A method for fabricating the device is also disclosed. The first device wafer is bonded to an etched substrate wafer 600 to create a suspended diaphragm 500 and boss 550, the flexure of which is determined by an embedded sensing element 850.

COPYRIGHT: (C)2013,JPO&INPIT