发明名称 SEMICONDUCTOR SUBSTRATE, METHOD OF MANUFACTURING THE SAME, AND SEMICONDUCTOR DEVICE USING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor substrate in which semiconductor layers having thicknesses that accommodate different kind of semiconductor elements are provided on one insulating film, a method of manufacturing the same, and a semiconductor device using the same. <P>SOLUTION: A semiconductor substrate 10 having a first insulating layer 5 and a semiconductor layer 7 provided on the first insulating layer includes: a second insulating layer 13 that is selectively provided in the semiconductor layer and extends in parallel to a surface of the semiconductor layer, and of which the length in the extending direction is shorter than the length of the first insulating layer; and a third insulating layer 15 that extends from the surface of the semiconductor layer to the first insulating layer and electrically isolates a portion of the semiconductor layer including the second insulating layer with the rest of the semiconductor layer. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012243848(A) 申请公布日期 2012.12.10
申请号 JP20110110371 申请日期 2011.05.17
申请人 TOSHIBA CORP 发明人 TAKAI NAOYA
分类号 H01L21/762;H01L21/02;H01L21/336;H01L21/76;H01L21/8234;H01L27/06;H01L27/08;H01L27/12;H01L27/14;H01L29/786 主分类号 H01L21/762
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