| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor which simplifies and downsizes a tuning fork type vibrator through self-diagnosis by commonly using an oscillation circuit. <P>SOLUTION: In an angular velocity sensor with a self-diagnosis function, a drive electrode (9), a detection electrode (20) and self-diagnosing electrodes (6 and 7) are provided on a tuning fork type vibrator (1), and each arm part (2 and 3) of the tuning fork type vibrator (1) is driven symmetrically or asymmetrically by selectively turning on/off each self-diagnosing electrode (6 and 7) and the drive electrode (9) through a pair of switches (SW1 and SW2) and commonly using only one oscillation circuit (10). <P>COPYRIGHT: (C)2013,JPO&INPIT |
