| 摘要 |
<P>PROBLEM TO BE SOLVED: To easily attach/detach a stopper having the opening of an air path in a chuck device having a function of air-detecting the clamped state of a workpiece. <P>SOLUTION: The stopper attaching structure of the chuck device is formed in such a way that the rear surface of a workpiece w is brought into close contact with the front face 17a of a stopper 17 disposed on a chuck body 12, and the stopper 17 includes an air path 50 having an opening 51 in the abutting part of the front face 17a on the workpiece w, and has a function of determining whether the clamped state of the workpiece w is good or not. The chuck body 12 includes a locking projected part 58 projecting forward in the axial direction, and the stopper 17 is fitted to the locking projected part 58 to be fixed. The air path 50 passes from the chuck body 12 side through a path 50c in the locking projected part 58 to be communicated with paths 50b and 50a in the stopper 17 communicating with the opening 51. Between the stopper 17 and the locking projected part 58, a locking means 59 in which when the stopper 17 is fitted in the locking projected part 58, retention is automatically performed and which can release the retention is formed. <P>COPYRIGHT: (C)2013,JPO&INPIT |
