| 摘要 |
<P>PROBLEM TO BE SOLVED: To favorably maintain contact resistance between an electrode body and a conducting electrode of a semiconductor circuit of a semiconductor device in the configuration of the circuit. <P>SOLUTION: There is provided a semiconductor device comprising a circuit including: a silicide which becomes an electrode body of the semiconductor circuit; and a contact plug which is electrically connected to the silicide and becomes a conducting electrode formed in a space to which a side surface of the silicide is exposed after a stopper layer is removed. <P>COPYRIGHT: (C)2013,JPO&INPIT |
