MICRO MECHANICAL VIBRATOR AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a micro mechanical vibrator in which a resonance frequency control mechanism is easily built and which can perform resonance frequency control over a wide frequency band.

SOLUTION: The micro mechanical vibrator includes: a silicon oxide film 2 formed on a silicon substrate 1; electrodes 4, 5 formed on the silicon oxide film 2; a vibrator portion 7 which has one end connected to the electrode 4 and is formed so that a part which is not fixed by the electrode 4 and silicon oxide film 2 protrudes into an opening portion 6; and a control electrode portion 8 which has one end connected to the electrode 5 and is formed so that a tip portion which is not fixed by the electrode 5 and silicon oxide film 2 faces a tip portion of the vibrator portion 7 protruding into the opening portion 6.

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