| 摘要 |
<P>PROBLEM TO BE SOLVED: To create an electrode foil with large capacity, which has a little variation in capacitance. <P>SOLUTION: In a vapor deposition boat 13, a recessed groove 17 is composed of: a recessed groove for supply 19A to which at least a vapor deposition material is supplied; a recessed groove for evaporation 20 in communication with the recessed groove for supply 19A; and a recessed groove for diffusion 19B in communication with the recessed groove for evaporation 20. A ratio of a resistance value of a region of a substrate 18 on which surface the recessed groove for evaporation 20 is formed to the respective resistance values of the regions of the substrate 18 on which surface the recessed groove for supply 19A and the recessed groove for diffusion 19B are formed is not less than the value obtained by dividing the boiling point of the vapor deposition material by the melting point of the vapor deposition material. Thus, the temperature near the recessed groove for supply 19A is decreased, melt and oxidization of the vapor deposition material near the recessed groove for supply 19A is suppressed, and the amount of evaporation is stabilized. Also, the vapor deposition material can uniformly reach the end of the recessed groove 17, so that an uniform layer of a coarse film 7 can be formed. <P>COPYRIGHT: (C)2013,JPO&INPIT |
