| 摘要 |
PURPOSE: A floating substrate coater device is provided to overcome the instable state of floating force due to impurities in the suction hole of a floating stage. CONSTITUTION: A floating substrate coater device includes a floating stage(110), a connecting conduit(119c), an opening and closing valve(v2), a gripping unit, and a chemical supplying unit. The floating stage includes a plurality of spraying holes and a plurality of suction holes and floats a substrate to be treated. The connecting conduit connects a gas supplying pipe and a gas suction pipe. The opening and closing valve transfers gas controlled by a compressor to the suction holes. The gripping unit moves the gripped substrate. The chemical supplying unit coats chemical on the surface of the substrate to be treated. [Reference numerals] (112) Compressor; (113) Regulator; (114) Flow meter; (115) Vacuum pump; (AA) Pressure; (BB) Vacuum |
