| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure equipment capable of exposing a panel with a high efficiency and a low cost even when exposing substrates with different cell layout, and to provide a shading plate used in the exposure equipment. <P>SOLUTION: In an exposure equipment, a mask 20 for exposure has an arrangement of a plurality of pattern areas 20a corresponding to a display panel. A microlens array 22 is provided with two microlens array chips 22a in a direction vertical to a scan direction so that a part thereof is overlapped each other in the direction vertical to the scan direction. A shading plate 30 shades a part of the microlens array chip 22a, and an opening of the shading plate 30 regulates light transmission of the microlens array chip such that one microchip array 22a exposes two pattern areas 20a only, while the other microchip array 22a exposes three pattern areas 20a only. <P>COPYRIGHT: (C)2013,JPO&INPIT |
