MONOCHROMATOR FOR CHARGED PARTICLE BEAM APPARATUS, AND ELECTRONIC APPARATUS USING THE SAME

摘要

PROBLEM TO BE SOLVED: To realize a monochromator which reduces energy spread of a primary electron beam and improves resolution of a low-voltage SEM.

SOLUTION: A monochromator 500 is formed which comprises: a first dispersion unit 200 and a second dispersion unit 400, aligned with an optical axis Z, for deflecting a charged particle beam with a normal energy and an energy spread; an energy-limit aperture 300 at a central plane 310 between the first and second dispersion units; and a beam adjustment element 100 for focusing the charged particle beam. A virtual crossover S6 of the charged particle beam is formed between the first dispersion unit 200 and the energy-limit aperture 300.

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