| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce weight while highly accurately controlling a flow rate of a fluid, in a flow rate control apparatus. <P>SOLUTION: The flow rate control apparatus 10 is equipped with a valve mechanism 20, which is capable of controlling a flow rate of a pressure fluid that flows from a second port 16 to a first port 12. Second stopper walls 110a and 110b are formed on a seating section 100 of a needle valve 24 constituting the valve mechanism 20 and which is capable of advancing and retracting in an axial direction. In addition, in a total valve-closed state when the seating section 100 of the needle valve 24 is seated on a seat 50 of a first body 14, the second stopper walls 110a and 110b come into abutment and are stopped in a circumferential direction of the needle valve 24 with respect to first stopper walls 54a and 54b of the first body 14. <P>COPYRIGHT: (C)2013,JPO&INPIT |
