| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high precision position measuring instrument configured without mechanically connecting a movable member in the position measuring instrument to as many other members as possible. <P>SOLUTION: A detection unit 20 and a signal unit 30 are formed as structurally separated units, the detection unit 20 is arranged displaceably along at least one measurement direction x with respect to measuring standard 10, the signal unit 30 irradiates beams irradiated from a light source toward the detection unit, the detection unit 20 irradiates at least one pair of partial beams toward the signal unit 30, the detection unit 20 and the signal unit 30 are arranged in flat surfaces in parallel with each other, and at least a portion of an expansion direction of the beams between the signal unit 30 and the detection unit 20 is configured so as to be directed perpendicularly to the flat surfaces. <P>COPYRIGHT: (C)2013,JPO&INPIT |
