| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wafer storage container which efficiently prevents the occurence of particles and achieves further prevention of wafer contamination by supporting a wafer more preferably. <P>SOLUTION: A wafer storage container 1 comprises: a container body 4 having an opening 3 at the front side and including support members 25 supporting a disc like wafer 2; and a lid body 5 closing the opening 3 and including a retainer 21 holding the wafer 2. Regions where edges are formed attributable to the crystal orientation, from among an outer peripheral part of the wafer 2, are set as non contact regions A. The retainer 21 and the support members 25 contact with the wafer 2 in positions that avoid the non contact regions A. <P>COPYRIGHT: (C)2013,JPO&INPIT |
