发明名称 SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device for which wiring in a memory cell of an SRAM is surely formed and an electric connection is excellently performed. <P>SOLUTION: In the memory cell of the SRAM in the semiconductor device, a via VS1 to be electrically connected to a third wiring M32 as a word line is directly connected to a contact plug CPS1 electrically connected to a gate wiring part GHA1 of an access transistor T1. Also, a via VS2 to be electrically connected to the third wiring M32 as the word line is directly connected to a contact plug CPS2 electrically connected to a gate wiring part GHA2 of an access transistor T2. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012244107(A) 申请公布日期 2012.12.10
申请号 JP20110115841 申请日期 2011.05.24
申请人 RENESAS ELECTRONICS CORP 发明人 TSUBOI NOBUO
分类号 H01L21/8244;H01L27/10;H01L27/11 主分类号 H01L21/8244
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