| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve such problems that it is effective, in an optical scanning device for torsionally vibrating, by a piezoelectric element, a mirror supported by a torsional beam and scanning light, to enhance a field intensity applied to the piezoelectric element for enlarging a scan angle or achieving a large scan angle at a low voltage and it is required to thin a piezoelectric layer, however, when a piezoelectric plate is thinned to 100 μm or less, the mechanical strength is lowered and, when a lamination structure is adopted by thinning the piezoelectric layer while retaining the mechanical strength, a capacitance increases and a power consumption increases. <P>SOLUTION: The optical scanning element is configured by sticking a unimorph or bimorph piezoelectric element in which a piezoelectric thick film is formed on a substrate, to a mirror frame. A mirror supported by a torsional hinge is formed on the mirror frame. <P>COPYRIGHT: (C)2013,JPO&INPIT |
