| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultrasonic transducer element 20 stabilized in its characteristics. <P>SOLUTION: The ultrasonic transducer element 20 includes a silicon substrate 11, a lower electrode layer 12, a first insulating layer 13, a second insulating layer 15 having a cavity 14A and a channel 14B formed therein, and an upper electrode layer 16. First and second cavities 14A1 and 14A2 are different in size. The shortest distance d1 from a first opening part 15C1 to the center of the first cavity 14A1 through a first channel 14B1 is the same as the shortest distance d2 from a second opening part 15C2 to the center of the second cavity 14A2 through a second channel 14B2. <P>COPYRIGHT: (C)2013,JPO&INPIT |
