摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultrasonic microscope capable of observing the inside of a sample at a high spatial resolution corresponding to the frequency of a high frequency ultrasonic wave. <P>SOLUTION: An ultrasonic microscope 1a of the present invention is equipped with pulse light irradiation means 5 for irradiating pulse light, an ultra-wave transmission part 4a for emitting an ultrasonic wave due to a thermoelastic effect by absorbing the irradiated pulse light and for transmitting the ultrasonic wave to a sample S, and an optical elastic member 6 for receiving a reflection ultrasonic wave reflected by the sample S to be propagated inside therein and for exhibiting optical elasticity by propagated reflection ultrasonic wave. The ultrasonic microscope 1a is further equipped with measuring light irradiation means for irradiating measuring light to cross a propagation path of the reflection ultrasonic wave that is propagated in the optical elastic member 6, measuring light detection means for receiving transit measuring light that crosses the propagation path of the reflection ultrasonic wave and for detecting an intensity change of the received transit measuring light, and internal information acquisition means 8 for acquiring internal information inside the sample S based on the intensity change detected by the measuring light detection means. <P>COPYRIGHT: (C)2013,JPO&INPIT |